Ultra-Low Loss and Fabrication Tolerant Silicon Nitride (Si3N4) (de-)Muxes for CWDM Optical Interconnects.

Stanley Cheung Michael R. T. Tan

Published in: OFC (2020)

Keyphrases

high speed
fiber optic
electrical properties
integrated circuit
electron beam
metal oxide
input output
high density
thin film
low cost
plasma etching
high levels
solid state
atmospheric turbulence
chemical vapor deposition
cloud computing
data sets
silicon nitride