Fast Response Microgas Sensors Based on Platinum Nanoclusters Sputtered on Nanocrystalline tin Oxide Thin Films.

Behzad Esfandyarpour Ebrahim Asl Soleimani

Published in: CCECE (2006)

Keyphrases

thin film
room temperature
electron microscopy
silicon nitride
high density
short circuit
multi layer
sensor data
sensor networks
grain size
chemical vapor deposition
multi sensor
real time
viewpoint
film thickness
databases
silicon dioxide
plasma etching
low cost
database
machine learning