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Ge surface passivation by GeO2 fabricated by N2O plasma oxidation.
Meng Lin
Xia An
Ming Li
Quanxin Yun
Min Li
Zhiqiang Li
Pengqiang Liu
Xing Zhang
Ru Huang
Published in:
Sci. China Inf. Sci. (2015)
Keyphrases
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scanning electron microscope
three dimensional
surface reconstruction
high speed
d objects
range data
electron beam
high density
image segmentation
photometric stereo
reconstruction method
geo spatial
surface fitting
plasma etching