A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging.
Pengcheng YanYulan LuChao XiangJunbo WangDeyong ChenJian ChenPublished in: Sensors (2019)
Keyphrases
- space charge
- high density
- electric field
- high speed
- chemical vapor deposition
- silicon dioxide
- sensor data
- thin film
- ultra high
- flow rate
- frequency band
- low cost
- data center
- multichip module
- pulse width
- high temperature
- room temperature
- surface temperature
- temperature control
- relative humidity
- design process
- heat flow
- electro mechanical systems