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Physical Vapor Deposition technique and its application to thin organometallic films.
Anna Zawadzka
P. Plóciennik
K. Waszkowska
Z. Masewicz
A. Aamoum
Janusz Strzelecki
Andrzej Korcala
B. Sahraoui
Published in:
ICTON (2017)
Keyphrases
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electrical properties
chemical vapor deposition
film thickness
thin film
permalloy films
rf sputtering
grain size
electron micrographs
plasma etching
real world
high density
database
learning algorithm
learning environment
mobile robot
physical systems