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Dependence of film surface roughness on surface migration and lattice size in thin film deposition.
Jianqiao Huang
Gangshi Hu
Gerassimos Orkoulas
Panagiotis D. Christofides
Published in:
ACC (2011)
Keyphrases
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thin film
film thickness
surface roughness
high density
white light interferometry
electrical properties
curved surfaces
multi layer
manufacturing process
surface shape
specular reflection
room temperature
refractive index
plasma etching
chemical vapor deposition
solar cell
single image