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Nanoelectronics: From silicon to graphene.
Udo Schwalke
Pia Juliane Wessely
Frank Wessely
Martin Keyn
Lorraine Rispal
Published in:
DTIS (2012)
Keyphrases
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high density
low cost
high speed
plasma etching
thin film
semiconductor devices
artificial intelligence
computer vision
artificial neural networks
markov chain
x ray
steady state
transmission electron microscopy
chemical vapor deposition