Two-stage Atomic Layer Deposition of Smooth Aluminum Oxide on Hydrophobic Self-assembled Monolayers.
Nobuhiko P. KobayashiR. Stanley WilliamsPublished in: Eng. Lett. (2008)
Keyphrases
- silicon nitride
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- electron microscopy
- room temperature
- high density
- coarse grained
- plasma etching
- protein structure prediction
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