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Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps.
Alicja Lesniewska
Olalla Varela Pedreira
Melina Lofrano
Gayle Murdoch
Marleen H. van der Veen
Anish Dangol
Naoto Horiguchi
Zsolt Tokei
Kris Croes
Published in:
IRPS (2021)
Keyphrases
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transmission electron microscopy