Plasma processing in the fabrication of amorphous silicon thin-film-transistor arrays.

Yue Kuo Kenji Okajima Masatomo Takeichi

Published in: IBM J. Res. Dev. (1999)

Keyphrases

thin film transistor
thin film
plasma etching
liquid crystal displays
high density
transmission electron microscopy
chemical vapor deposition
tft lcd
x ray
low density
high speed
electron microscopy
computer vision
low cost