Fabrication of thin-wall inverted pyramid hollow tips array and nano-aperture for maskless nanoscaled plasma patterning.
Jie LiuLi WenHan LiHai WangJinlan PengPublished in: NEMS (2015)
Keyphrases
- high density
- plasma etching
- integrated circuit
- thin film
- nano scale
- multiscale
- multiresolution
- imaging systems
- high energy
- focal plane
- low density
- chemical vapor deposition
- electron microscopy
- programmable logic
- scale space
- high speed
- input image
- binary tree
- image processing
- image representation
- image pyramids
- electrical properties
- linear array
- image sensor
- data center