Stiction of parylene C to silicon surface measured using blister tests.

Feiqiao Yu Jeffrey Chun-Hui Lin Po-Jui Chen Yu-Chong Tai

Published in: NEMS (2010)

Keyphrases

silicon dioxide
si sio
three dimensional
d objects
low cost
computer vision
space charge
surface features
surface model
surface reconstruction
surface patches
range data
vector field
surface fitting
high speed
object surface
surface geometry
shape index
face recognition
object recognition