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High-Throughput Electron Beam Direct Writing of VIA Layers by Character Projection with One-Dimensional VIA Characters.

Rimon IkenoTakashi MaruyamaSatoshi KomatsuTetsuya IizukaMakoto IkedaKunihiro Asada
Published in: IEICE Trans. Fundam. Electron. Commun. Comput. Sci. (2013)
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