Radiation damages of polycrystalline silicon films and npn Si transistors by high-energy particle irradiation.
Hidenori OhyamaM. NakabayashiEddy SimoenCor ClaeysT. TanakaT. HiraoS. OnadaK. KobayashiPublished in: Microelectron. Reliab. (2001)
Keyphrases
- high energy
- chemical vapor deposition
- high density
- thin film
- small animal
- space charge
- solar cell
- low density
- x ray
- infrared
- plasma etching
- grain size
- field effect transistors
- cmos technology
- cone beam ct
- electron beam
- data center
- damage assessment
- low dose
- disease progression
- single photon emission computed tomography
- film thickness
- power consumption
- silicon nitride