Fabrication and performance of novel RF spiral inductors on silicon.
Xi-Ning WangXiao-Lin ZhaoYong ZhouXu-Han DaiBing-Chu CaiPublished in: Microelectron. J. (2005)
Keyphrases
- high density
- plasma etching
- semiconductor devices
- high speed
- low density
- radio frequency
- silicon on insulator
- thin film
- relevance feedback
- data center
- integrated circuit
- chemical vapor deposition
- low cost
- thin film transistor
- artificial intelligence
- real time
- electron beam
- magnetic recording
- information systems
- transmission electron microscopy
- image processing
- electrical properties
- data mining