Simulation of Energy Deposition in Deep X-Ray Lithography.
H. ZumaquéGregory Allen KohringJ. HormesPublished in: PARCO (1997)
Keyphrases
- x ray
- electron beam
- medical imaging
- x ray images
- electron beam lithography
- digital x ray images
- three dimensional
- intraoperative
- ct scans
- transmission electron microscopy
- tomographic images
- thin film
- electron microscopy
- computer tomography
- integrated circuit
- image guided
- design parameters
- fluoroscopic images
- low dose
- computer aided
- metal oxide