1 Million Intrinsic Q-Factor Microring Resonators From PVD Aluminum Nitride on SiO2-on-Si Substrate.

Amy S. K. Tong Wing Wai Chung Charmaine Goh Landobasa Y. M. Tobing Leh Woon Lim Yuriy A. Akimov Zhan Jiang Quek Aravind P. Anthur Jia Sheng Goh Huamao Lin Navab Singh Qingxin Zhang Doris Keh Ting Ng

Published in: OFC (2024)