An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography.
Zhen MaDavid M. KlymyshynSven AchenbachMartin BörnerNina DambrowskyJürgen MohrPublished in: IEICE Trans. Electron. (2007)
Keyphrases
- x ray
- electron beam
- high speed
- intraoperative
- electron beam lithography
- x ray images
- digital x ray images
- medical imaging
- tomographic images
- electron microscopy
- three dimensional
- integrated circuit
- transmission electron microscopy
- metal oxide
- ct scans
- design parameters
- projection images
- cone beam
- low dose
- optical imaging
- breast cancer detection
- electron microscope
- poor contrast