Ga doped ZnO thin films deposited by RF sputtering for NO2 sensing.
Lionel PresmanesVignesh GunasekaranYohann ThimontInthuga SinnarasaAntoine BarnabéPhilippe MéniniPhilippe TailhadesPublished in: exp.at (2019)
Keyphrases
- thin film
- rf sputtering
- room temperature
- magnetic field
- genetic algorithm ga
- genetic algorithm
- electron microscopy
- chemical vapor deposition
- silicon nitride
- film thickness
- high density
- fitness function
- short circuit
- sensor networks
- grain size
- multi layer
- multi objective
- artificial neural networks
- ant colony optimization
- genetic programming
- solar cell
- database systems
- evolutionary algorithm
- simulated annealing
- plasma etching
- neural network