A Novel Visual Fault Detection and Classification System for Semiconductor Manufacturing Using Stacked Hybrid Convolutional Neural Networks.
Tobias SchlosserFrederik BeuthMichael FriedrichDanny KowerkoPublished in: ETFA (2019)
Keyphrases
- fault detection
- semiconductor manufacturing
- convolutional neural networks
- fault diagnosis
- industrial processes
- pattern recognition
- failure detection
- fault identification
- feature extraction
- image classification
- discrete event simulation
- condition monitoring
- multiscale
- association rules
- artificial intelligence
- process control
- machine learning
- fault detection and diagnosis
- real time