Impact of intermediate BEOL technology on standard cell performances of 3D VLSI.
Melanie BrocardGuillaume BerhaultSébastien ThuriesFabien ClermidyPerrine BatudeClaire Fenouillet-BérangerLaurent BrunetFrançois AndrieuFabien DepratJoris LacordOlivier RozeauGerald CibrarioOlivier BillointPublished in: ESSDERC (2016)