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Die stacking using 3D-wafer level packaging copper/polymer through-si via technology and Cu/Sn interconnect bumping.

Yann CivaleDeniz Sabuncuoglu TezcanHarold G. G. PhilipsenP. JaenenRahul AgarwalF. DuvalPhilippe SoussanYoussef TravalyEric Beyne
Published in: 3DIC (2009)
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