SEMI-CenterNet: A Machine Learning Facilitated Approach for Semiconductor Defect Inspection.
Vic De RidderBappaditya DeyEnrique DehaerneSandip HalderStefan De GendtBartel Van WaeyenbergePublished in: CoRR (2023)
Keyphrases
- machine learning
- defect detection
- automated visual inspection
- machine learning methods
- pattern recognition
- explanation based learning
- artificial intelligence
- quality control
- learning systems
- knowledge acquisition
- machine learning approaches
- inductive learning
- machine learning algorithms
- natural language processing
- information extraction
- data mining
- computer vision
- text mining
- supervised learning
- data sets
- support vector machine
- data analysis
- computer science
- semiconductor manufacturing
- learning tasks
- neural network
- knowledge engineering
- databases
- learning algorithm
- computational biology
- statistical learning
- case study
- inductive logic programming
- learning problems
- kernel methods
- computational intelligence