Backside Alpha-Irradiation Test in Flip-Chip Package in EUV 7 nm FinFET SRAM.
Taiki UemuraByungjin ChungJeongmin JoHai JiangYongsung JiTae-Young JeongRakesh RanjanSeungbae LeeHwasung RheeSangwoo PaeEuncheol LeeJaehee ChoiShota OhnishiKen MachidaPublished in: IRPS (2020)