Keyphrases
- thin film
- plasma etching
- silicon dioxide
- solar cell
- film thickness
- multi layer
- high density
- silicon nitride
- chemical vapor deposition
- short circuit
- semiconductor devices
- chance discovery
- low density
- neural network
- electrical properties
- room temperature
- grain size
- neural nets
- lagrange interpolation
- high speed
- fuzzy logic
- viewpoint
- three dimensional