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Automated visual inspection for lsi water multilayer patterns by cascade pattern matching algorithm.
Shunji Maeda
Hitoshi Kubota
Hiroshi Makihira
Takanori Ninomiya
Yasuo Nakagawa
Yuzo Taniguchi
Published in:
Systems and Computers in Japan (1990)
Keyphrases
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pattern matching algorithm
pattern matching
automated visual inspection
matching algorithm
aho corasick
quality control
query patterns
string matching
compression algorithm
regular expressions
tree patterns
machine vision
database systems
real time
defect detection
feature selection
information retrieval