Fabrication of Microbolometer Arrays Based on Polymorphous Silicon-Germanium.
Ricardo JimenezMario MorenoAlfonso TorresAlfredo MoralesArturo PonceDaniel FerruscaJose de Jesus Rangel-MagdalenoJorge Castro-RamosJulio Noel Hernandez-PerezEduardo CanoPublished in: Sensors (2020)
Keyphrases
- high density
- plasma etching
- semiconductor devices
- high speed
- low density
- high impact
- silicon on insulator
- data center
- thin film
- magnetic recording
- field effect transistors
- chemical vapor deposition
- integrated circuit
- low cost
- genetic algorithm
- electrical properties
- cmos technology
- linear array
- real time
- electron beam
- databases