Cost-effective cleaning and high-quality thin gate oxides.

Marc M. Heyns Twan Bearda Ingrid Cornelissen Stefan De Gendt Robin Degraeve Guido Groeseneken Conny Kenens D. Martin Knotter Lee M. Loewenstein Paul W. Mertens Sofie Mertens Marc Meuris Tanya Nigam Marc Schaekers Ivo Teerlinck Wilfried Vandervorst Rita Vos Klaus Wolke

Published in: IBM J. Res. Dev. (1999)

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