In-line Process Monitoring for Amorphous Oxide Semiconductor TFT Fabrication using Microwave-detected Photoconductivity Decay Technique.
Hiroshi GotoHiroaki TaoShinya MoritaYasuyuki TakanashiAya HinoTomoya KishiMototaka OchiKazushi HayashiToshihiro KugimiyaPublished in: IEICE Trans. Electron. (2014)
Keyphrases
- thin film transistor
- liquid crystal displays
- thin film
- transmission electron microscopy
- plasma etching
- tft lcd
- electron microscopy
- room temperature
- silicon dioxide
- high density
- electrical properties
- x ray
- semiconductor devices
- field effect transistors
- production line
- silicon nitride
- fuel cell
- semiconductor manufacturing
- image formation
- hough transform
- high resolution