Challenges in the Assembly and Handling of Thin Film Capped MEMS Devices.

Jeroen J. M. Zaal Willem D. van Driel G. Q. Zhang

Published in: Sensors (2010)

Keyphrases

thin film
lessons learned
multi layer
short circuit
solar cell
mobile devices
neural network
real world
high density
plasma etching
electron microscopy
grain size
database
high resolution
data visualization