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Challenges in the Assembly and Handling of Thin Film Capped MEMS Devices.

Jeroen J. M. ZaalWillem D. van DrielG. Q. Zhang
Published in: Sensors (2010)
Keyphrases
  • thin film
  • lessons learned
  • multi layer
  • short circuit
  • solar cell
  • mobile devices
  • neural network
  • real world
  • high density
  • plasma etching
  • electron microscopy
  • grain size
  • database
  • high resolution
  • data visualization