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Challenges in the Assembly and Handling of Thin Film Capped MEMS Devices.
Jeroen J. M. Zaal
Willem D. van Driel
G. Q. Zhang
Published in:
Sensors (2010)
Keyphrases
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thin film
lessons learned
multi layer
short circuit
solar cell
mobile devices
neural network
real world
high density
plasma etching
electron microscopy
grain size
database
high resolution
data visualization