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Fabrication of advanced probes for atomic force microscopy using focused ion beam.
O. A. Ageev
Alexey S. Kolomiytsev
A. V. Bykov
V. A. Smirnov
I. N. Kots
Published in:
Microelectron. Reliab. (2015)
Keyphrases
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atomic force microscopy
electron beam
electron beam lithography
search algorithm
special case
x ray
integrated circuit
high density
data sets
three dimensional
high speed
cross section
high energy
electrical properties