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I. N. Kots
Publication Activity (10 Years)
Years Active: 2015-2015
Publications (10 Years): 0
Top Topics
Electron Beam Lithography
High Energy
Cross Section
Top Venues
Microelectron. Reliab.
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Publications
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O. A. Ageev
,
Alexey S. Kolomiytsev
,
A. V. Bykov
,
V. A. Smirnov
,
I. N. Kots
Fabrication of advanced probes for atomic force microscopy using focused ion beam.
Microelectron. Reliab.
55 (9-10) (2015)