Optimum threshold generation for automated visual inspection of large-scale integration wafer patterns.
Shunji MaedaHitoshi KubotaHiroshi MakihiraPublished in: Systems and Computers in Japan (1996)
Keyphrases
- automated visual inspection
- quality control
- machine vision
- small scale
- pattern mining
- information retrieval
- defect detection
- real life
- data fusion
- scientific data analysis
- pattern discovery
- knowledge base
- neural network
- data integration
- frequent patterns
- data sets
- multi objective
- case study
- design patterns
- computer vision
- information integration
- pattern analysis
- learning algorithm
- massively parallel
- manufacturing process
- genetic algorithm
- databases