Fabrication of Thin-Film Fresnel Optics by Combining Diamond Turning and Photolithographic Processes.
Jiwang YanKenta WatanabeYutaro NakagawaPublished in: Int. J. Autom. Technol. (2013)
Keyphrases
- thin film
- high density
- plasma etching
- short circuit
- machine vision
- electron microscopy
- chemical vapor deposition
- multi layer
- low density
- data center
- solar cell
- grain size
- liquid crystal displays
- white light interferometry
- database
- decision making
- databases
- room temperature
- chance discovery
- integrated circuit
- image formation
- machine learning
- neural network