Construction of stochastic PDEs for feedback control of surface roughness in thin film deposition.
Dong NiPanagiotis D. ChristofidesPublished in: ACC (2005)
Keyphrases
- thin film
- feedback control
- surface roughness
- closed loop
- optimal control
- adaptive control
- high density
- plasma etching
- multi layer
- chemical vapor deposition
- solar cell
- specular reflection
- image processing
- level set
- manufacturing process
- room temperature
- quality control
- control law
- input output
- complex systems
- curved surfaces
- data mining
- film thickness
- neural network