Fault Detection Prediction Using a Deep Belief Network-Based Multi-Classifier in the Semiconductor Manufacturing Process.
Jae Kwon KimJong Sik LeeYoungshin HanPublished in: Int. J. Softw. Eng. Knowl. Eng. (2019)
Keyphrases
- fault detection
- manufacturing process
- fault diagnosis
- process control
- quality control
- manufacturing systems
- fault identification
- industrial processes
- fuel cell
- fault detection and diagnosis
- tennessee eastman
- failure detection
- control system
- product design
- product quality
- discrete event
- robust fault detection
- process planning
- power plant
- software engineering
- artificial neural networks
- expert systems
- data analysis
- decision making
- genetic algorithm