Microcrystalline silicon-germanium solar cells fabricated using VHF PECVD.

Satya Saripalli Vikram Dalal

Published in: EIT (2008)

Keyphrases

high speed
chemical vapor deposition
cmos technology
silicon on insulator
high impact
electron beam
low cost
low power
high density
image acquisition
thin film
visual cortex
microscope images
semiconductor devices
natural images
charge coupled device
cancer cells
plasma etching