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Reliability of polycrystalline silicon thin film resistors.
M. Nakabayashi
Hidenori Ohyama
Eddy Simoen
M. Ikegami
Cor Claeys
K. Kobayashi
M. Yoneoka
K. Miyahara
Published in:
Microelectron. Reliab. (2001)
Keyphrases
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thin film
solar cell
high density
plasma etching
chemical vapor deposition
silicon nitride
short circuit
electron microscopy
low density
integrated circuit
grain size
white light interferometry
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