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Thermally induced wrinkling in thin-film stacks on patterned substrates.
Kartik Srinivasan
Sanjay Goyal
Thomas Siegmund
Ganesh Subbarayan
Qinghuang Lin
Published in:
IBM J. Res. Dev. (2009)
Keyphrases
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thin film
high density
infrared
room temperature
short circuit
solar cell
grain size
multi layer
film thickness
white light interferometry
defect detection
electron microscopy
decision support system
chemical vapor deposition
plasma etching