In Situ Resistance Trimming of Directly Deposited Thin-Film Strain Gauges.
Rico OttermannShuowen ZhangBerend DenkenaHeinrich KlemmeDennis KowalkeMichael KorbacherFolke DenckerMarc Christopher WurzPublished in: IEEE SENSORS (2022)
Keyphrases
- thin film
- electron microscopy
- chemical vapor deposition
- film thickness
- silicon nitride
- high density
- short circuit
- solar cell
- grain size
- multi layer
- neural network
- x ray
- chance discovery
- room temperature
- low power
- decision support system
- decision making
- machine learning
- plasma etching
- databases
- white light interferometry