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thin films grown by E-beam evaporation.

Yongshik KimKunihiro MiyauchiShun'ichiro OhmiKazuo TsutsuiHiroshi Iwai
Published in: Microelectron. J. (2005)
Keyphrases
  • thin film
  • high density
  • short circuit
  • grain size
  • cross section
  • solar cell
  • reinforced concrete
  • multi layer
  • heat transfer
  • chemical vapor deposition
  • neural network
  • electron beam
  • room temperature