AR-Aided Smart Sensing for In-Line Condition Monitoring of IGBT Wafer.
Kongjing LiGui Yun TianXiaotian ChenChaoqing TangHaoze LuoWuhua LiBin GaoXiangning HeNick WrightPublished in: IEEE Trans. Ind. Electron. (2019)
Keyphrases
- condition monitoring
- augmented reality
- fault diagnosis
- fault detection
- power transformers
- acoustic emission
- nuclear power plant
- sensor networks
- simulation software
- line segments
- integrated circuit
- wireless sensor networks
- vibration signal
- semiconductor manufacturing
- tool wear
- data fusion
- production system
- smart environments
- evolutionary algorithm
- cutting tool
- image processing