Cross-sectional nanoprobing fault isolation technique on submicron devices.

Pik Kee Tan Huei Hao Yap Changqing Chen Francis Rivai Yu Zhe Zhao L. Zhu Hua Feng Hao Tan Ran He D. D. Wang Y. M. Huang Yin Zhe Ma Jeffery Lam Zhi Hong Mai

Published in: Microelectron. Reliab. (2016)