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An unsupervised neural network approach for automatic semiconductor wafer defect inspection.
Chuan-Yu Chang
ChunHsi Li
Jia-Wei Chang
MuDer Jeng
Published in:
Expert Syst. Appl. (2009)
Keyphrases
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semiconductor manufacturing
defect detection
automated visual inspection
fully automatic
data driven
wafer fabrication
integrated circuit
semi automatic
search algorithm
special case
information technology
quality control
clustering algorithm
multimedia
information systems
information retrieval
database