32-site microelectrode modified with Pt black for neural recording fabricated with thin-film silicon membrane.
Sanyuan ChenWeihua PeiHui ZhaoQiang GuiRongyu TangYuanfang ChenXiaolei FangBo HongXiaorong GaoHongda ChenPublished in: Sci. China Inf. Sci. (2014)
Keyphrases
- thin film
- solar cell
- high density
- plasma etching
- chemical vapor deposition
- high speed
- chance discovery
- website
- network architecture
- neural network
- bio inspired
- silicon nitride
- short circuit
- grain size
- electron microscopy
- multi layer
- machine learning
- cmos technology
- neural fuzzy
- electron beam
- databases
- data center
- silicon on insulator
- genetic algorithm
- white light interferometry