The effect of gate overlap lightly doped drains on low temperature poly-Si thin film transistors.
Jaehyun ChoSungwook JungKyungsoo JangHyungsik ParkJongkyu HeoWonbaek LeeDaeYoung GongSeungman ParkHyungwook ChoiHanwook JungByoungdeog ChoiJunsin YiPublished in: Microelectron. Reliab. (2012)
Keyphrases
- thin film
- solar cell
- high density
- room temperature
- short circuit
- chemical vapor deposition
- chance discovery
- leakage current
- field effect transistors
- plasma etching
- cmos technology
- grain size
- multi layer
- low density
- liquid crystal displays
- power consumption
- electron microscopy
- database
- white light interferometry
- film thickness
- circuit design
- low power
- data center
- wireless sensor networks
- data analysis