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Enhanced stability of ITO/In2O3 thin film thermocouples by coating Al2O3 layer.
Yantao Liu
Dan Liu
Wei Ren
Peng Shi
Ming Liu
Zuo-Guang Ye
Bian Tian
Zhuangde Jiang
Published in:
IEEE SENSORS (2017)
Keyphrases
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thin film
multi layer
middle layer
high density
short circuit
grain size
solar cell
neural network
learning algorithm
plasma etching
electron microscopy
chemical vapor deposition
decision making
wireless sensor networks
neural nets
room temperature