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Thin Film Formation Utilizing RF Sputtering.

Kyung Eun ParkShun'ichiro Ohmi
Published in: IEICE Trans. Electron. (2020)
Keyphrases
  • thin film
  • rf sputtering
  • high density
  • short circuit
  • multi layer
  • grain size
  • solar cell
  • electron microscopy
  • machine learning
  • room temperature
  • film thickness
  • chemical vapor deposition