Integrated photonic devices and circuits in multilayer silicon nitride-on-silicon platforms.
Joyce K. S. PoonWesley D. SacherYing HuangGuo-Qiang LoPublished in: OFC (2015)
Keyphrases
- silicon nitride
- silicon dioxide
- high speed
- thin film
- semiconductor devices
- mobile platforms
- low cost
- mobile devices
- cmos technology
- electrical properties
- data sets
- mobile applications
- web services
- delay insensitive
- desktop computers
- floating gate
- high temperature
- physical characteristics
- mobile apps
- analog circuits
- digital circuits
- circuit design
- time of flight
- high density
- neural network