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Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability.

Y.-L. LiZsolt TokeiPhilippe RousselGuido GroesenekenKaren Maex
Published in: Microelectron. Reliab. (2005)
Keyphrases
  • information content
  • layout design
  • genetic algorithm
  • closed form
  • highly reliable
  • reliability assessment
  • neural network
  • dependency relations
  • hierarchically organized
  • poisson distribution
  • document image retrieval